A micromachined scanning Fabry-Perot interferometer

被引：21

作者：

Zavracky, PM ^{[1
]}

Denis, KL ^{[1
]}

Xie, HK ^{[1
]}

Wester, T ^{[1
]}

Kelley, P ^{[1
]}

机构：

[1] Northeastern Univ, Dept Elect Engn, Boston, MA 02115 USA

来源：

MICROMACHINED DEVICES AND COMPONENTS IV | 1998年 / 3514卷

关键词：

spectrometer; interferometer; micromachined; MEMS; Fabry Perot;

D O I：

10.1117/12.323885

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this talk, a micromachined scanning Fabry-Perot interferometer (FPI) employing electrostatic actuators and tuned to the visible spectrum is described. Previous authors have demonstrated micromachined Fabry-Perot devices. The FPI described here offers a simpler process flow and a broader tuning range. The FPI is constructed by separately fabricating a MEMS actuator and semi-transparent optical mirrors. These are then assembled to complete the device. The competed device consists of two plane parallel mirrors separated by a small gap (<1 mu m). The gap is formed by a sacrifical layer which is etched away to free the gold beams. Devices have been fabricated using single layer aluminum mirrors. Modeling results of devices incorporating dielectric multi-layer stacks will. be discussed. Present devices are suitable for scanning the entire visible region of the spectrum 450-750nm Actuating voltages of approximately 60V are required. Devices fabricated with aluminum mirrors have resolving powers of up to 50. Proposed applications include in situ measurements of plasma composition, colorimetric, and chemical analysis.

引用

页码：179 / 187

页数：9