Trends in electromechanical transduction

[1] Continuous-membrane surface-micromachined silicon deformable mirror [J]. OPTICAL ENGINEERING, 1997, 36 (05) : 1354 - 1360

[2] Curie J., 1880, C. R. Acad. Sci, V91, P294

[3] HASSELMARK ED, 1986, Patent No. 4585978

[4] Holmes M, 1997, PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, P474

[5] LANGEVIN P, 1921, Patent No. 145691

[6] Lindsay R. B., 1973, PHYS TODAY, V26, P55

[7] MODELING OF PIEZOELECTRIC CERAMIC VIBRATORS INCLUDING THERMAL EFFECTS .1. THERMODYNAMIC PROPERTY CONSIDERATIONS [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1995, 98 (01) : 403 - 412

[8] RISTIC L, 1994, SENSOR TECHNOLOGY DE, pCH1

[9] SAVAGE HT, 1981, Patent No. 4308474

[10] Scheeper P. R., 1992, Journal of Microelectromechanical Systems, V1, P147, DOI 10.1109/84.186394

[1] Continuous-membrane surface-micromachined silicon deformable mirror [J]. OPTICAL ENGINEERING, 1997, 36 (05) : 1354 - 1360

[2] Curie J., 1880, C. R. Acad. Sci, V91, P294

[3] HASSELMARK ED, 1986, Patent No. 4585978

[4] Holmes M, 1997, PROCEEDINGS OF THE TWELFTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, P474

[5] LANGEVIN P, 1921, Patent No. 145691

[6] Lindsay R. B., 1973, PHYS TODAY, V26, P55

[7] MODELING OF PIEZOELECTRIC CERAMIC VIBRATORS INCLUDING THERMAL EFFECTS .1. THERMODYNAMIC PROPERTY CONSIDERATIONS [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1995, 98 (01) : 403 - 412

[8] RISTIC L, 1994, SENSOR TECHNOLOGY DE, pCH1

[9] SAVAGE HT, 1981, Patent No. 4308474

[10] Scheeper P. R., 1992, Journal of Microelectromechanical Systems, V1, P147, DOI 10.1109/84.186394