Different oxidation states of polycrystalline molybdenum treated by O2-plasma or O2-ion bombardment

被引:16
作者
Lopez-Carreno, LD
Benitez, G
Viscido, L
Heras, JM
Yubero, F
Espinos, JP
Gonzalez-Elipe, AR
机构
[1] Natl Univ La Plata, INIFTA, RA-1900 La Plata, Argentina
[2] Inst Ciencia Mat Sevilla, Seville 41092, Spain
关键词
AES; molybdenum; oxidation; XPS;
D O I
10.1016/S0039-6028(97)00973-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The oxidation of Mo polycrystalline foils at room temperature, through O-2-ion bombardment and a reactive O-2 plasma studied by XPS and AES, is reported. Samples bombarded with O-2 ions showed Mo 3d XP spectra with two broad peaks, which can be deconvoluted with standard spectra of Mo-0 a small contribution of Mo6+ and residue assigned to Mo4+ and Mon+ with n<4. Those samples treated with plasma showed three peaks resulting from signal superposition, mainly of Mo-0, Mo6+, a small contribution of Mo4+ and Mon+. In the region of the Mo-MNN Auger transitions (150-240 eV), three new peaks appeared upon oxidation. at similar to 5 eV lower kinetic energy than in Mo-0. The relative intensities within each pair of peaks at 160, 186, and 221 eV depend on the oxidation method, i.e. on the kind of oxide formed. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:174 / 177
页数:4
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