Synthesis of periodic mesoporous silica thin films

被引:14
作者
Anderson, MT
Martin, JE
Odinek, JG
Newcomer, P
机构
来源
MICROPOROUS AND MACROPOROUS MATERIALS | 1996年 / 431卷
关键词
D O I
10.1557/PROC-431-217
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have synthesized periodic mesoporous silica thin films (PMSTF) from homogeneous solutions. To synthesize the films a thin layer of a pH = 7 micellar coating solution that contains TMOS is dip- or spin-coated onto silicon wafers, borosilicate glass, or quartz substrates. Ammonia gas is diffused into the solution and causes rapid hydrolysis and condensation of the TMOS and the formation of periodic mesoporous thin films within similar to 10 seconds. The combination of homogeneous solutions and rapid product formation maximizes the concentration of desired product and provides a controlled, predictable microstructure. The films have been made continuous and crack-free by optimizing initial silica concentration and film thickness.
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页码:217 / 223
页数:7
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