Low-loss passive polymer optical waveguides with high environmental stability

Deuterated polysiloxane with high transparency and high thermal stability was newly synthesized for use as optical waveguide material, Single-mode channel waveguides using the polymer were fabricated by conventional photolithography and dry etching. The propagation loss of the channel waveguides was measured and found to be 0.17 dB/cm at 1.31 mu m and 0.43 dB/cm at 1.55 mu m, The thermal and environmental stability of the waveguides was demonstrated by the fact that the propagation loss remained unchanged after tests at 200 degrees C for 30 min, at 120 degrees C for 1000 h, and at 75 degrees C and 90% RH for 1000 h.