Localized laser damage test facility at LOSCM: Real time optical observation and quantitative AFM study

被引：10

作者：

Natoli, JY ^{[1
]}

Volto, P ^{[1
]}

Pommies, M ^{[1
]}

Albrand, G ^{[1
]}

Amra, C ^{[1
]}

机构：

[1] Ecole Natl Super Phys Marseille, Lab Opt Surfaces & Couches Minces, CNRS, UPRES A, F-13397 Marseille 20, France

来源：

LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1997, PROCEEDINGS | 1998年 / 3244卷

关键词：

D O I：

10.1117/12.306969

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser damage studies were recently introduced at LOSCM. We first describe our experimental set-up and its performances, The device is equipped with a 7 ns Nd : YAG pulsed laser. Surface modifications due to laser irradiation are observed in real time through a Nomarski microscope placed behind the sample along the optical axis. The beam is aligned with a He-Ne laser and focused in a spot. of 25 mu m in diameter, which permits a localized study and the determination of intrinsic and extrinsic damage thresholds. The LIDT is determined by the real time Nomarski observation. To go further into the analysis of laser impact we use an Atomic Force Microscope with a micrometric repositioning system that permits a quantitative study. We detail the first results concerning LIDT and morphology of several materials produced by electron beam deposition at LOSCM (Zns, Na3AlF6, SiO2, Ta2O5, HfO2 and, multidielectric mirrors). The whole characterization is performed in strong correlation with deposition parameters and cleanliness control, which allow us to draw a set of preliminary conclusions.

引用

页码：76 / 85

页数：10