Kinetics of solid phase epitaxy in buried amorphous Si layers formed by MeV ion implantation

The kinetics of solid phase epitaxy have been measured in buried amorphous Si layers produced by ion implantation. Crystallization occurs simultaneously at both amorphous/crystalline interfaces of the buried layer. By collecting time resolved reflectivity data simultaneously at lambda=1152 nm and lambda=632.8 nm it is possible to accurately determine the crystallization rates at both interfaces. Both interfaces crystallize at a constant rate that is comparable to the intrinsic rate found for thick amorphous surface layers before rate retardation due to H infiltration has occurred. Thus, buried amorphous Si layers provide a suitable environment for studies of the intrinsic growth kinetics of amorphous Si. (C) 1996 American Institute of Physics.