A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining

被引：103

作者：

Shinno, H. ^{[1
]}

Yoshioka, H. ^{[1
]}

Taniguchi, K. ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Yokohama, Kanagawa 227, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2007年 / 56卷 / 01期

基金：

日本学术振兴会;

关键词：

table; ultra-precision; nano-machining;

D O I：

10.1016/j.cirp.2007.05.086

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The importance of nano-machining processes is continually increasing in a wide range of industries. In particular, the demands for machining with stable nanometer order accuracy in a wide work area have recently increased in the electronics and automotive industries. In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this study, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The,results of actual machining tests confirmed that the developed table system has a remarkable performance.

引用

页码：369 / 372

页数：4

共 7 条

[1]

Shamoto E, 1997, CIRP ANNALS 1997 MANUFACTURING TECHNOLOGY, VOLUME 46/1/1997, V46, P301

[2]

Shinno H, 1999, CIRP ANNALS 1999 - MANUFACTURING TECHNOLOGY, P289

[3] X-Y-θ nano-positioning table system for a mother machine [J].