Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

被引：52

作者：

Dwivedi, Neeraj ^{[1
]}

Kumar, Sushil ^{[1
]}

Ishpal ^{[1
]}

Dayal, Saurabh ^{[1
]}

Govind ^{[2
]}

Rauthan, C. M. S. ^{[1
]}

Panwar, O. S. ^{[1
]}

机构：

[1] CSIR, Natl Phys Lab, Plasma Proc Mat Grp, New Delhi 110012, India

[2] CSIR, Natl Phys Lab, Surface Phys & Nano Struct Grp, New Delhi 110012, India

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2011年 / 509卷 / 04期

关键词：

Multilayer; Low vacuum; Nanostructure; DIAMOND-LIKE CARBON; FIELD-EMISSION; THIN-FILMS; MECHANICAL-PROPERTIES; SOLAR-CELL; SPECTROSCOPY; NANOTUBES; GROWTH;

D O I：

10.1016/j.jallcom.2010.10.016

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nanostructured copper/hydrogenated amorphous carbon (a-C H) multilayer grown in a low base vacuum (1 x 10(-3) Torr) system combining plasma-enhanced chemical vapor deposition and sputtering techniques These nanostructured multilayer were found to exhibit Improved electrical optical surface and structural properties compared to that of monolayer a-C H films The residual stresses of such multilayer structure were found well below 1 C Pa Scanning electron microscopy and atomic force microscopy results revealed a nanostructured surface morphology and low surface roughnesses values X-ray photoelectron spectroscopy secondary ion mass spectroscopy and energy dispersive X-ray analysis confirmed a very small amount of copper in these films These structures exhibited very high optical transparency in the near infrared region (similar to 90%) and the optical band gap varied from 1 35 to 1 7 eV It was noticed that the temperature dependent conductivity improved due to the presence of both copper and the nano-structured morphology (C) 2010 Elsevier B V All rights reserved

引用

页码：1285 / 1293

页数：9

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