Report on a second round robin measurement of the thermal conductivity of CVD diamond

被引:38
作者
Graebner, JE
Altmann, H
Balzaretti, NM
Campbell, R
Chae, HB
Degiovanni, A
Enck, R
Feldman, A
Fournier, D
Fricke, J
Goela, JS
Gray, KJ
Gu, YQ
Hatta, I
Hartnett, TM
Imhof, RE
Kato, R
Koidl, P
Kuo, PK
Lee, TK
Maillet, D
Remy, B
Roger, JP
Seong, DJ
Tye, RP
Verhoeven, H
Wörner, E
Yehoda, JE
Zachai, R
Zhang, B
机构
[1] Univ Wurzburg, D-97074 Wurzburg, Germany
[2] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
[3] UFRGS, Inst Fis, BR-91501 Porto Alegre, RS, Brazil
[4] Holometrix Inc, Bedford, MA 01730 USA
[5] Soonchunhyang Univ, Choongnam, South Korea
[6] ENSEM, LEMTA, F-54504 Vandoeuvre Nancy, France
[7] Carborundum Microelect, Phoenix, AZ 85008 USA
[8] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
[9] Univ Paris 06, F-75005 Paris, France
[10] Morton Int, Woburn, MA 01801 USA
[11] Norton Diamond Film, Northborough, MA 01532 USA
[12] Tsing Hua Univ, Beijing 100084, Peoples R China
[13] Nagoya Univ, Nagoya, Aichi 46901, Japan
[14] Raytheon Co, Lexington, MA 01273 USA
[15] S Bank Univ, London SE1 0AA, England
[16] Ulvac Sinku Riko Inc, Yokohama, Kanagawa 226, Japan
[17] Fraunhofer Inst Angew Festkorperphys, IAF, D-79108 Freiburg, Germany
[18] Wayne State Univ, Detroit, MI 48201 USA
[19] Korea Inst Stand & Sci, Taejon 305600, South Korea
[20] Diamonex, Allentown, PA 18106 USA
[21] Daimler Benz AG, D-7900 Ulm, Germany
关键词
CVD diamond; round robin measurement; thermal conductivity; silicon carbide; aluminum nitride;
D O I
10.1016/S0925-9635(98)00241-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The results of a round robin series of measurements of the thermal conductivity and thermal diffusivity of chemical-vapor-deposited (CVD) diamond are reported. The present round robin (RR2) is an outgrowth of an earlier series (RR1) aimed at understanding which measurement techniques are best suited to measuring the high conductivity of CVD diamond. RR2 includes diamond specimens of higher homogeneity, non-diamond specimens of lower conductivity as controls, and measurements by 14 laboratories using five techniques, with all techniques but one used by more than one laboratory. The data are converted to thermal conductivity at 25 degrees C to facilitate comparisons among specimens and laboratories. The statistical analysis excludes outliers using Chauvenet's criterion, resulting in data from typically two or three laboratories being excluded for each specimen. The analysis arrives at mean values in the range 1300-2000 W m(-1) K-1 for the diamond samples, as expected because of the conditions of preparation, with uncertainties in the range 1.5-4%. For the non-diamond materials, SIC and AIN, the results are 268 W m(-1) K-1 +/- 2.2% and 178 W m(-1) K-1 +/- 2.5%, respectively. Comparing techniques, the d.c.-heated bar is found to be the most accurate, typically +/-5% or better. Under favorable conditions, Angstrom's thermal wave method can apparently yield relative uncertainties of +/-5-10%, and the mirage effect +/-5-15%. Too few laboratories used the transient thermal grating and laser flash methods to make general comments on their accuracy, but one expects a comparable accuracy if used on specimens that are fine-grained and thermally isotropic. Deviations, sometimes large, from these optimal accuracies are examined, and it is suggested that certain experimental details are important for achieving accuracy. It is also found that the estimates of experimental uncertainty provided by most laboratories seriously underestimate the actual deviations of their data from the mean conductivity. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1589 / 1604
页数:16
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