Preferred orientation in PbZrO3 thin film prepared by sol-gel technique

被引:6
作者
Bae, SH
Jeon, KB
Jin, B [1 ]
机构
[1] Dongeui Univ, Dept Phys, Jin Gu, Pusan 614714, South Korea
[2] Dong Ah Univ, Dept Phys, SaHa Gu, Pusan 604714, South Korea
关键词
thin films; atomic force microscopy; sol-gel chemistry; X-ray diffraction; crystal structure;
D O I
10.1016/S0025-5408(00)00443-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sol-gel derived lead zirconate (PbZrO3; PZ) thin films on Pt-coated substrate was studied to investigate the effect of drying temperature on preferred orientation, The preference of orientation was found to strongly depend on the drying temperature. Films dried below 340 degreesC were found to have a (221) preferred orientation, whereas those dried above 350 degreesC: had a (220) preferred orientation. Annealing temperature was also found to be an important factor. No significant difference was found for the thermal treatment methods, normal furnace and rapid thermal annealing (RTA). The results of X-ray diffraction and rocking curve analysis were confirmed by atomic force microscopy (AFM) study of the morphologies of the films. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:2245 / 2251
页数:7
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