The DMD™ projection display chip:: A MEMS-based technology

被引:94
作者
Hornbeck, LJ [1 ]
机构
[1] Texas Instruments Inc, DLP Prod, Plano, TX 75086 USA
关键词
D O I
10.1557/mrs2001.72
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:325 / 327
页数:3
相关论文
共 12 条
[1]  
BANG C, 2000, MEMS MOEMS TECHNOLOG, V85, P331
[2]  
CHU H, DMD SUPERSTRUCTURE C, P75
[3]  
DOUGLASS M, IDENTIFYING ELIMINAT, P128
[4]   Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD) [J].
Douglass, MR .
1998 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 36TH ANNUAL, 1998, :9-16
[5]  
FARIS J, DMD PACKAGES EVOLUTI, P87
[6]  
Hornbeck L.J., 1997, ASME DSC, V62, P3
[7]  
HORNBECK LJ, CATHODE RAYS DIGITAL, P7
[8]  
MEIER RE, DMD PIXEL MECH SIMUL, P64
[9]  
MIGNARDI MA, ICS DMDS, P56
[10]  
MIGNARDI MA, 2000, MEMS MOEMS TECHNOLOG, V85, P169