Investigation of damage formation by gas cluster ion bombardment

被引：6

作者：

Matsuo, J

Takeuchi, D

Kitai, A

Yamada, I

机构：

[1] Ion Beam Eng. Exp. Laboratory, Kyoto University, Sakyo

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 112卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01231-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Ar cluster ion bombardment has been carried out to study impact processes of cluster ions on solid surfaces with various ion energies. In the case of Ar cluster ion bombardment with an energy of 150 keV, a damaged layer of about 200 Angstrom thickness was formed. This thickness is significantly larger than the value calculated for Ar monomer ions with the same velocity as the cluster ions. The thickness of the damaged layer is strongly dependent on the cluster size. Surprisingly, thicker damaged layers are formed with increasing cluster size, if the cluster ion energies are same. These results strongly suggest a new damage formation mechanism by high-energy cluster ion bombardment.

引用

页码：89 / 93

页数：5

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