Integrated optics devices for long ranging surface plasmons: fabrication challenges and solutions

被引：7

作者：

Mattiussi, G ^{[1
]}

Lahoud, N ^{[1
]}

Charbonneau, R ^{[1
]}

Berini, P ^{[1
]}

机构：

[1] Spectalis Corp, Unit 1, Nepean, ON K2E 7L2, Canada

来源：

MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS III | 2005年 / 5720卷

关键词：

metal waveguides; plasmons; integrated optics; lithium niobate;

D O I：

10.1117/12.600788

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A review of the principal issues related to the fabrication of long-ranging surface plasmon metal waveguides (MWG's) and associated passive and active elements is presented. A discussion of the fabrication requirements for MWG devices is given, followed by examples of various challenges encountered in their fabrication along with associated solutions. The examples cover devices made in a range of materials, including glass, lithium niobate, and PUT ferroelectrics. Finally, a view on future fabrication strategies is given.

引用

页码：173 / 186

页数：14

共 20 条

[1]

Bergman DJ, 2004, LASER PHYS, V14, P409

[2] Plasmon-polariton waves guided by thin lossy metal films of finite width: Bound modes of asymmetric structures [J].