Oblique powder blasting for three-dimensional micromachining of brittle materials

被引：30

作者：

Belloy, E ^{[1
]}

Sayah, A ^{[1
]}

Gijs, MAM ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microsyst, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 92卷 / 1-3期

关键词：

sand blasting; powder blasting; microfabrication; erosion; etching;

D O I：

10.1016/S0924-4247(01)00572-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identified and quantified the role of secondary rebounding particles in mask underetching. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：358 / 363

页数：6

共 6 条

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SENSORS AND ACTUATORS A-PHYSICAL, 2000, 84 (03) :330-337

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[6]

Wensink H., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P769, DOI 10.1109/MEMSYS.2000.838615

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