Millimetre-wave coplanar waveguide slow wave transmission lines on InP

被引：11

作者：

Bottcher, EH

Pfitzenmaier, H

Droge, E

Bimberg, D

机构：

[1] Technische Universität Berlin, Inst. F. Festkörperphysik I, D-10623 Berlin

来源：

ELECTRONICS LETTERS | 1996年 / 32卷 / 15期

关键词：

coplanar waveguides; transmission lines; indium phosphide; metal-semiconductor-metal structures; photodetectors;

D O I：

10.1049/el:19960919

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Millimetre-wave slow wave electrodes on InP are realised by capacitively loading of coplanar waveguide (CPW) transmission lines using interdigitated metal-semiconductor-metal (MSM) structures. The slow wave structures are designed for velocity matching with InP-based optical waveguides and a 50 Omega line impedance. Their dispersion, loss and impedance characteristics are measured up to 40GHz, and they demonstrate the suitability of the lines for use in distributed MSM photodetectors.

引用

页码：1377 / 1378

页数：2

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