Quadrature demodulation technique for self-mixing interferometry displacement sensor

被引:46
作者
Guo, Dongmei [1 ]
机构
[1] Nanjing Normal Univ, Sch Phys Sci & Technol, Nanjing 210046, Peoples R China
关键词
Displacement sensor; Self-mixing interferometry; Quadrature demodulation; FOURIER-TRANSFORM METHOD; LASER; MODULATION;
D O I
10.1016/j.optcom.2011.08.027
中图分类号
O43 [光学];
学科分类号
070207 [光学];
摘要
A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:5766 / 5769
页数:4
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