Thermal desorption study of bonded hydrogen in diamond films

被引：6

作者：

Arkhipov, II ^{[1
]}

Spitsyn, BV ^{[1
]}

Gorodetsky, AE ^{[1
]}

Zakharov, AP ^{[1
]}

Popovici, G ^{[1
]}

Sung, T ^{[1
]}

Prelas, MA ^{[1
]}

Khasawinah, S ^{[1
]}

机构：

[1] UNIV MISSOURI,DEPT NUCL ENGN,COLUMBIA,MO 65211

来源：

关键词：

diamond film; thermal desorption; bonded hydrogen; water vapour;

D O I：

10.1016/0925-9635(95)00327-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The amount of bonded hydrogen in polycrystalline diamond films grown by hot filament CVD at various deposition temperatures was measured by the thermal desorption method. The amount of hydrogen evolved from as-grown diamond films had the tendency to increase with deposition temperature. After vacuum annealing at 1470 K the samples were exposed to air at room temperature. It was shown that the presence of bonded hydrogen in these films was related to water adsorption on the diamond surface. The surface morphology of the films was studied by scanning electron microscopy. It was found that the higher the deposition temperature and the greater the sample thickness, the larger are the crystals with {111} faces.

引用

页码：121 / 123

页数：3

共 8 条

[1] THERMAL HYDROGENATION OF DIAMOND SURFACES STUDIED BY DIFFUSE REFLECTANCE FOURIER-TRANSFORM INFRARED, TEMPERATURE-PROGRAMMED DESORPTION AND LASER RAMAN-SPECTROSCOPY [J].