Fabrication of arrays of channel waveguides by self-assembly using patterned organic monolayers as templates

被引:55
作者
Kim, E
Whitesides, GM
Lee, LK
Smith, SP
Prentiss, M
机构
[1] HARVARD UNIV,DEPT CHEM,CAMBRIDGE,MA 02138
[2] HARVARD UNIV,DEPT PHYS,CAMBRIDGE,MA 02138
关键词
D O I
10.1002/adma.19960080207
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Optical waveguides([1,2]) are structures that confine and guide light waves. They are important in a range of applications: communication lines, photonic sensors (bio-,([3]) chemo-,([4,5]) and fluoro-sensors([6])), and components of optical devices([7]) such as couplers, splitters, and interferometers. In particular, channel waveguides([8]) allow high integration density, unambiguous sensing held, and spatial multiplexing in optical systems. These channel (or strip) waveguides are fabricated by dry etching,([9,10]) localized ion exchange,([11]) laser-densification of sol-gel films,([12]) direct laser writing,([13]) and conventional photolithographic techniques.([14-16])
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页码:139 / &
页数:5
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