MoO3-based sputtered thin films for fast NO2 detection

被引：124

作者：

Ferroni, M

Guidi, V

Martinelli, G

Sacerdoti, M

Nelli, P

Sberveglieri, G

机构：

[1] Univ Ferrara, Dipartimento Fis, I-44100 Ferrara, Italy

[2] Univ Ferrara, INFM, I-44100 Ferrara, Italy

[3] Univ Ferrara, Ist Mineral, I-44100 Ferrara, Italy

[4] Univ Brescia, Dipartimento Chim & Fis & Mat, I-25133 Brescia, Italy

[5] Univ Brescia, INFM, I-25133 Brescia, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 48卷 / 1-3期

关键词：

molybdenum oxide; sputtering; NO2; thin film;

D O I：

10.1016/S0925-4005(98)00057-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The authors report about preparation and characterization of thin films of MoO3 as a material for gas-sensing applications. Structural investigation of the films is carried out by electron microscopy and X-ray diffraction techniques. The sensing behavior of the MoO3 films was tested to NO2, showing capability to detect a few ppm of NO2 with considerably short response time. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：285 / 288

页数：4

共 11 条

[1] Microstructural characterization of a titanium-tungsten oxide gas sensor
Ferroni, M
Guidi, V
Martinelli, G
Sberveglieri, G
[J]. JOURNAL OF MATERIALS RESEARCH, 1997, 12 (03) : 793 - 798
[2] SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS
GOPEL, W
SCHIERBAUM, KD
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 1 - 12
[3] GOPEL W, 1995, SENSORS DOMESTIC APP, P49
[4] Madou M., 1989, CHEM SENSING SOLID S, P74
[5] MOSELEY PT, 1991, A HILGER SERIES, P111
[6] NELLI P, 1996, SENSOR ACTUAT B-CHEM, V31, P1
[7] IDENTIFICATION OF GASES WITH CLASSICAL PATTERN-RECOGNITION METHODS AND ARTIFICIAL NEURAL NETWORKS
NIEBLING, G
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) : 259 - 263
[8] THE EFFECT OF ADDITIVES IN TIN OXIDE ON THE SENSITIVITY AND SELECTIVITY TO NOX AND CO
SAYAGO, I
GUTIERREZ, J
ARES, L
ROBLA, JI
HORRILLO, MC
GETINO, J
RINO, J
AGAPITO, JA
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 19 - 23
[9] A NEW TECHNIQUE FOR GROWING LARGE SURFACE-AREA SNO2 THIN-FILM (RGTO TECHNIQUE)
SBERVEGLIERI, G
FAGLIA, G
GROPPELLI, S
NELLI, P
CAMANZI, A
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (12) : 1231 - 1233
[10] WO3 SPUTTERED THIN-FILMS FOR NOX MONITORING
SBERVEGLIERI, G
DEPERO, L
GROPPELLI, S
NELLI, P
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 89 - 92

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