A decade of MEMS and its future

被引：44

作者：

Fujita, H

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581729

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper deals with a history of microelectromechanical system(MEMS) development in this decade. An overview of the MEMS research topics is also given. The topics include microactuators, microsensors, micro miniature motion-systems(e.g. microrobots), applications and the fabrication technology involved. MEMS is supposed to contribute the 21th Century society in three major areas such as (1) wider distribution of and easier access to information, (2) compatible lifestyle with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are discussed.

引用

页码：1 / 8

页数：8