Electron energy distribution functions and rate and transport coefficients of H-2/H/CH4 reactive plasmas for diamond film deposition

被引：19

作者：

Capitelli, M

Colonna, G

Hassouni, K

Gicquel, A

机构：

[1] UNIV BARI,DIPARTMENTO CHIM,BARI,ITALY

[2] UNIV PARIS 13,LIMHP,F-93430 VILLETANEUSE,FRANCE

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1996年 / 16卷 / 02期

关键词：

electron energy distribution function; transport coefficients; diamond films; CH4/H-2; plasma;

D O I：

10.1007/BF01570175

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Electron energy distribution functions (eedf) and rate and transport coefficients for H-2/H/CH4 mixtures have been calculated-by solving a stationary Boltzmann equation as a function of reduced electric field E/N, of molar fraction, and of different different concentrations of electronically excited states. Superelastic electronic collisions superimpose structures to eedf especially for E/N values<40 Td.

引用

页码：153 / 171

页数：19

共 14 条

[1]

BUCKMANN SJ, 1985, 27 U COL JIL INF CTR

[2] JOINT VIBRO-ELECTRONIC MECHANISM IN DISSOCIATION OF MOLECULAR-HYDROGEN IN NON-EQUILIBRIUM PLASMAS [J].