All-inkjet-printed flexible electronics fabrication on a polymer substrate by low-temperature high-resolution selective laser sintering of metal nanoparticles

被引:637
作者
Ko, Seung H.
Pan, Heng
Grigoropoulos, Costas P.
Luscombe, Christine K.
Frechet, Jean M. J.
Poulikakos, Dimos
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA
[3] ETH, Dept Mech & Proc Engn, Lab Thermodynam Emerging Technol, CH-8092 Zurich, Switzerland
关键词
FIELD-EFFECT TRANSISTORS; CIRCUITS; PERFORMANCE; SIZE;
D O I
10.1088/0957-4484/18/34/345202
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
All-printed electronics is the key technology to ultra-low-cost, large-area electronics. As a critical step in this direction, we demonstrate that laser sintering of inkjet-printed metal nanoparticles enables low-temperature metal deposition as well as high-resolution patterning to overcome the resolution limitation of the current inkjet direct writing processes. To demonstrate this process combined with the implementation of air-stable carboxylate-functionalized polythiophenes, high-resolution organic transistors were fabricated in ambient pressure and room temperature without utilizing any photolithographic steps or requiring a vacuum deposition process. Local thermal control of the laser sintering process could minimize the heat-affected zone and the thermal damage to the substrate and further enhance the resolution of the process. This local nanoparticle deposition and energy coupling enable an environmentally friendly and cost-effective process as well as a low-temperature manufacturing sequence to realize large-area, flexible electronics on polymer substrates.
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页数:8
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