Textures in diamond, GaN and SiC thin films

被引：1

作者：

Helming, K ^{[1
]}

Herres, N

Rauschenbach, R

机构：

[1] Tech Univ Clausthal, Inst Met Kunde & Met Phys, D-36678 Clausthal Zellerfeld, Germany

[2] Fraunhofer Inst Angew Festkorperphys, FHG, IAF, D-79108 Freiburg, Germany

[3] Univ Augsburg, Inst Phys, D-86135 Augsburg, Germany

来源：

TEXTURE AND ANISOTROPY OF POLYCRYSTALS | 1998年 / 273-2卷

关键词：

heterostructures; multi-layers; texture components; sample symmetry;

D O I：

10.4028/www.scientific.net/MSF.273-275.561

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The information on thin films accessed by texture analysis is discussed. Typical problems in this field and their methodical solution are explained. This is followed by a look on some examples.

引用

页码：561 / 566

页数：6

共 4 条

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[2] TEXTURE ANALYSIS OF CHEMICAL-VAPOR-DEPOSITED DIAMOND FILMS ON SILICON BY THE COMPONENT METHOD [J].

HELMING, K ;

GEIER, S ;

SCHRECK, M ;

HESSMER, R ;

STRITZKER, B ;

RAUSCHENBACH, B .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4765-4770

[3]

Helming K, 1995, THESIS TU CLAUSTHAL

[4] ORIENTED CVD DIAMOND FILMS - TWIN FORMATION, STRUCTURE AND MORPHOLOGY [J].

WILD, C ;

KOHL, R ;

HERRES, N ;

MULLERSEBERT, W ;

KOIDL, P .

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