共 14 条
[1]
AHN CH, 1993, J MICROELECTROMECH S, V2, P15
[2]
CAMPANU M, 2000, J MICROELECTROMECH S, V9, P181
[5]
FULLIN E, 1998, MEMS 1998 WORKSH HEI
[7]
HOSAKA H, 1993, MICR EL MECH SYST C
[8]
Jackson J.D., 1999, Classical electrodynamics
[10]
LIU C, 1999, IEEE T MAGN, V35, P1976