Crystal direction of CdS thin film produced by laser ablation

被引:36
作者
Sakai, H [1 ]
Tamaru, T
Sumomogi, T
Ezumi, H
Ullrich, B
机构
[1] Hiroshima Denki Inst Technol, Hiroshima 7390321, Japan
[2] Shimane Coll Nursing, Dept Fundamental Educ, Izumo, Shimane 693, Japan
[3] Univ Tokyo, Dept Phys, Bunkyo Ku, Tokyo 113, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 07期
关键词
laser ablation; CdS; thin film; crystal direction; XRD; AFM;
D O I
10.1143/JJAP.37.4149
中图分类号
O59 [应用物理学];
学科分类号
摘要
The crystal direction of CdS thin films produced by the laser ablation was measured using X-ray diffractometer (XRD). The results reveal that the direction of the CdS crystal depends considerably on the substrate temperature and laser energy density. The c-axis of the CdS crystal changed from perpendicular to parallel with the surface as the laser energy density increased, The parallality of c-axis may be due to the clusters included ir. the laser plume. On the other hand, the c-axis changed from parallel to perpendicular as the substrate temperature increased. This phenomenon is considered to be that the clusters on the substrate melting and re-crystallizing at the film surface due to the high temperature prevailing during laser ablation.
引用
收藏
页码:4149 / 4153
页数:5
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