Surface acoustic wave sensors for high-temperature applications

被引：118

作者：

Hornsteiner, J ^{[1
]}

Born, E ^{[1
]}

Fischerauer, G ^{[1
]}

Riha, E ^{[1
]}

机构：

[1] Tech Univ Munich, D-8000 Munich, Germany

来源：

PROCEEDINGS OF THE 1998 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM | 1998年

关键词：

D O I：

10.1109/FREQ.1998.717964

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Results of investigations of surface acoustic wave (SAW) devices working at high temperatures are presented in this paper. The considered substrate materials are lithium niobate (LiNbO3), quartz and langasite (La3Ga5SiO14). In addition, electrode materials and assembly, interconnect and packaging strategies are discussed or examined. Delay lines on LiNbO3 had low SAW attenuation up to approx. 550 degrees C. The frequency response disappeared completely at about 800 degrees C. Delay lines on quartz had low SAW attenuation up to 500 degrees C, a temperature being significantly below the phase transition from alpha- to beta-quartz at 573 degrees C. Delay lines on La3Ga5SiO14 withstand extreme temperatures: a SAW response was observed up to 1060 degrees C. The progressive destruction of the commercial SMD packages used in these tests, however, resulted in a degradation of the device performance starting at about 600 degrees C. An identification (ID) tag on La3Ga5SiO14, could be used as a wireless passive thermometer for measuring high temperatures in industrial process control applications.

引用

页码：615 / 620

页数：6