Photoluminescence of surface-nitrided nanocrystalline silicon dots

被引:2
作者
Arai, K [1 ]
Oda, S [1 ]
机构
[1] JST, Tokyo Inst Technol, Res Ctr Quantum Effect Elect, Meguro Ku, Tokyo 1528552, Japan
来源
2ND INTERNATIONAL CONFERENCE ON SEMICONDUCTOR QUANTUM DOTS | 2003年
关键词
D O I
10.1002/pssc.200303062
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Light-emitting surface-oxidized nanocrystalline-silicon (nc-Si) dots have been nitrided by nitrogen radicals. The durability of the nc-Si dots under laser illumination was improved by nitridation. It was concluded that Si3N4 is formed at the interface between the nc-Si core and SiO2 because a blue shift of the emission of the nc-Si dots was observed after nitridation at room temperature, suggesting that the interface of the nc-Si dots was improved. This result illustrates that nitridation is an effective treatment to improve the durability of the nc-Si dots.
引用
收藏
页码:1254 / 1257
页数:4
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