Local held enhancement effects for nanostructuring of surfaces

We report on a method that allows the nanostructuring of surfaces with intense laser pulses. For this purpose isolated polystyrene spheres with diameters in the order of the laser wavelength were deposited on a silicon or glass surface. Illumination with short and ultrashort laser pulses produced holes underneath these particles. Calculations of the field near the particles make clear that geometrical optics, that is, focusing by a spherical lens, as well as near-field effects, contribute to the size and shape of these holes. This technique can be utilized for the parallel structuring of large surface areas with a single laser shot.