THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII
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1998年
/
505卷
关键词:
D O I:
10.1557/PROC-505-559
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
By use of dc-magnetron sputtering, (111) textured Ag/Ni muitilayered thin films were deposited with nominal bilayer repeat lengths ranging from 2 nm to 250 nm. Bulk and interface stresses were obtained from X-ray diffraction and measurements of substrate curvatures. Both in-plane and out-of-plane expansions were observed in the Ni layers, and a compressive interface stress of -2.24+/-0.21 J/m(2) was found. This is in agreement with a previously published result of the interface stress in Ag/Ni thin films which had, as opposed to the present multilayers, a high level of total stress.