Investigation on bistability in inductively-coupled plasma torches with non-conventional coil

被引：3

作者：

Bernardi, D

Colombo, V

Coppa, GGM

Ghedini, E

Mentrelli, A

机构：

[1] Univ Bologna, Dipartimento Ingn Costruz Meccan, DIEM, I-40123 Bologna, Italy

[2] CIRAM, I-40123 Bologna, Italy

[3] Politecn Torino, Ist Nazl Fis Mat, I-10129 Turin, Italy

[4] Politecn Torino, Dipartimento Energet, I-10129 Turin, Italy

来源：

HIGH TEMPERATURE MATERIAL PROCESSES | 2003年 / 7卷 / 01期

关键词：

inductively-coupled plasma torch; non-conventional coil configuration; time-dependent simulation; parametric analysis; bistability;

D O I：

10.1615/HighTempMatProc.v7.i1.110

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In previous works on ICPTs with split coil [1, 2], the Authors pointed out that for a particular choice of the geometric parameters two equilibrium states for the plasma exist for the same induction coil current. In the present study, a deep investigation of the transition between the two states is performed with a time-dependent simulation code, evidencing a sort of hysteresis phenomenon. A parametric study is carried out in order to find threshold parameters for the bistability in different geometries. For some cases, time oscillating behaviour of plasma is found.

引用

页码：71 / 76

页数：6