An acousto-optic vibrometer for measurement of vibration in ultra-precision machine tools

Measurement of vibration is a vital factor that limits the precision and accuracy of machining of micro and macro components. In this paper, a novel technique for measurement of vibration is proposed using an acousto-optic modulator, which highlights an improved approach in measuring vibration in the subnanometre range. An experimental comparison was made with a laser Doppler vibrometer. This novel concept is proposed for application to a precision machine tool to measure the vibration on the machine bed induced during the machining process and by the external environment, which can be compensated for by in-process techniques. This novel measurement technique can also be applied for the precision measurement of the stage movement in ultra-precision machines to a subnanometre resolution.