Thin film metallic glasses: Fabrication and property test

被引：10

作者：

Liu, YD ^{[1
]}

Hata, S ^{[1
]}

Wada, K ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo, Japan

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906489

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Attributed to the characteristics of no size effect and good machinability, metallic glasses are considered to be ideal materials for micro-electro-mechanical systems (MEMS). In this paper, two kinds of thin film metallic glasses (TFMGs), the Zr-based (Zr75Cu19Al6 atomic %) and the Pd-based (Pd76Cu6Si18) TFMGs were fabricated using RF-magnetron sputtering system, and the amorphicity of the as-sputtered TFMGs were verified by X-ray diffraction and electron diffraction patterns. Compositions of the TFMGs were analyzed by energy dispersive X-ray spectrometry. Meanwhile, the thermal, mechanical and electrical properties of the TFMGs were experimentally examined, which provide an important guide for the analysis and design of their MEMS applications.

引用

页码：102 / 105

页数：2

共 12 条

[1] Thermodynamics and kinetics of the Mg65Cu25Y10 bulk metallic glass forming liquid [J].

Busch, R ;

Liu, W ;

Johnson, WL .

JOURNAL OF APPLIED PHYSICS, 1998, 83 (08) :4134-4141

[2] Mechanically alloyed Zr55Al10Cu30Ni5 metallic glass composites containing nanocrystalline W particles [J].

Eckert, J ;

Kübler, A ;

Schultz, L .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (10) :7112-7119

[3] AL-LA-CU AMORPHOUS-ALLOYS WITH A WIDE SUPERCOOLED LIQUID REGION [J].

INOUE, A ;

YAMAGUCHI, H ;

ZHANG, T ;

MASUMOTO, T .

MATERIALS TRANSACTIONS JIM, 1990, 31 (02) :104-109

[4] NEW AMORPHOUS MG-CE-NI ALLOYS WITH HIGH-STRENGTH AND GOOD DUCTILITY [J].

INOUE, A ;

OHTERA, K ;

KITA, K ;

MASUMOTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (12) :L2248-L2251

[5] Viscous flow deformation in supercooled liquid state of bulk amorphous Zr55Al10Ni5Cu30 alloy [J].

Inoue, A ;

Kawamura, Y ;

Shibata, T ;

Sasamori, K .

MATERIALS TRANSACTIONS JIM, 1996, 37 (06) :1337-1341

[6]

INOUE A, 1990, MATER T JIM, V31, P183

[7]

INOUE A, 1993, METALS, V63, P51

[8] PHYSICAL AND MECHANICAL-PROPERTIES OF ZR-BASED METALLIC GLASSES [J].

KIMURA, H ;

KISHIDA, M ;

KANEKO, T ;

INOUE, A ;

MASUMOTO, T .

MATERIALS TRANSACTIONS JIM, 1995, 36 (07) :890-895

[9]

Sharpe WN, 1996, P SOC PHOTO-OPT INS, V2880, P78, DOI 10.1117/12.250969

[10] Rheological behavior of superplastic nanocrystalline and amorphous materials [J].

Smirnov, OM .

TOWARDS INNOVATION IN SUPERPLASTICITY II, 1999, 304-3 :341-348

← 1 2 →