Model for quantitative analysis of reflection-electron-energy-loss spectra: Angular dependence

A model to reproduce inelastic electron scattering cross sections as determined from reflection-electronenergy-loss experiments is proposed. This model is an extension of model B from Yubero and Tougaard [Phys. Rev. B 46, 2486 (1992)]. Here, a more general geometry is considered where the incidence and exit angles can be varied. Then, for a given geometry and energy of the primary electrons, the dielectric function of the sample is the only input for the calculations. A systematic study of the behavior of the model is presented for the case of Si and Fe.