The high pressure torch discharge plasma source

被引:26
作者
Kapicka, V
Sícha, M
Klíma, M
Hubicka, Z
Tous, J
Brablec, A
Slavícek, P
Behnke, JF
Tichy, M
Vaculík, R
机构
[1] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic
[2] Charles Univ, Fac Math & Phys, Dept Elect & Vacuum Phys, CR-18000 Prague 8, Czech Republic
[3] Univ Greifswald, Inst Phys, D-17487 Greifswald, Germany
关键词
D O I
10.1088/0963-0252/8/1/002
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We present a plasma source which works on the principle of the are torch discharge. The powered electrode of the are torch discharge was made from a thin pipe that simultaneously acts as the nozzle through which the working gas flows to the discharge region. The Bow of the working gas stabilizes the are torch discharge and a well defined plasma channel is created. The advantage of this system is that it is able to work at high pressure of working gas up to atmospheric pressure inside the plasma-chemical reactor and also in free space.
引用
收藏
页码:15 / 21
页数:7
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