Thin-film interference effects on the efficiency of a normal-incidence grating in the 100-350-Å wavelength region

被引：17

作者：

Seely, JF ^{[1
]}

Goray, LI

Hunter, WR

Rife, JC

机构：

[1] USN, Res Lab, Washington, DC 20375 USA

[2] Int Intellectual Grp Inc, Penfield, NY 14526 USA

[3] Sachs Freeman Associates Inc, Landover, MD 20785 USA

来源：

APPLIED OPTICS | 1999年 / 38卷 / 07期

关键词：

D O I：

10.1364/AO.38.001251

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Thin-film interference effects were observed in the normal-incidence efficiency of a 2400-groove/mm replica grating. The efficiency was measured in the 100-350-Angstrom wavelength range and had an oscillatory behavior that resulted from the presence of a thin SiO2, coating. The thicknesses of the SiO2, and the underlying oxidized aluminum layers were inferred from computer modeling of the zero-order efficiency. The efficiencies in the diffracted orders were calculated with the modified integral approach and accounting for the multilayer coating and the groove profile derived from atomic force microscopy. The calculated and measured efficiencies were in good agreement. (C) 1999 Optical Society of America. OCIS codes: 050.1950, 050.1960, 260.3160, 260.7200, 310.6860.

引用

页码：1251 / 1258

页数：8

共 11 条

[1]

GORAY LI, 1995, P SOC PHOTO-OPT INS, V2515, P240, DOI 10.1117/12.212594

[2]

GORAY LI, 1994, P SOC PHOTO-OPT INS, V2278, P168, DOI 10.1117/12.180011

[3] X-RAY INTERACTIONS - PHOTOABSORPTION, SCATTERING, TRANSMISSION, AND REFLECTION AT E=50-30,000 EV, Z=1-92 [J].