Micro capillaries array head for direct drawing of fine patterns

被引：12

作者：

Ohigashi, R ^{[1
]}

Tsuchiya, K ^{[1
]}

Mita, Y ^{[1
]}

Fujita, H ^{[1
]}

机构：

[1] Dai Nippon Printing Co Ltd, Cent Res Inst, Kashiwa, Chiba 2770871, Japan

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906558

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Free-space micro ink streams are realized using an array of micro capillaries. Me is ejected from capillaries accelerated by an electric field with low or no back pressure applied. The capillaries are 20 mum in diameter, whereas the micro streams are only a few micrometers thick due to the Taylor cone effect. This method enables one to draw very fine lines without lithographical techniques. By applying an AC field, dotted lines can also be drawn. Direct drawing of both solid and dotted lines have successfully been demonstrated by applying DC and 500 Hz AC fields, respectively.

引用

页码：389 / 392

页数：4

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