Effect of crystallization on humidity sensing properties of sol-gel derived nanocrystalline TiO2 thin films

被引：87

作者：

Biju, Kuyyadi P. ^{[1
]}

Jain, Mahaveer K. ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Phys, Madras 600036, Tamil Nadu, India

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 08期

关键词：

crystallization; humidity sensor; titanium dioxide; nano-crystalline; SENSORS; WATER; OXIDES;

D O I：

10.1016/j.tsf.2007.06.147

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the present work, we describe the effect of crystallization on humidity sensing properties of nanocrystalline TiO2 thin films prepared by sol-gel techniques. Here, we report an enhancement in the relative humidity (RH) sensitivity just after the crystallization at 375 degrees C, which is attributed to increased surface activity near crystallization and lower crystallite size. After crystallization, the RH sensitivity was found to decrease with increasing grain size. The complex impedance of the sensor, measured using impedance spectroscopy, fits well with an equivalent circuit consisting of inter-granular resistance and capacitance in parallel. It was found that with the change in RH, only resistance changes significantly, when compared with the capacitance. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：2175 / 2180

页数：6

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