GaAs-compatible surface-micromachined RF MEMS switches

被引：38

作者：

Hyman, D

Schmitz, A

Warneke, B

Hsu, TY

Lam, J

Brown, J

Schaffner, J

Walston, A

Loo, RY

Tangonan, GL

Mehregany, M

Lee, J

机构：

[1] LLC, HRL Labs, Malibu, CA 90265 USA

[2] Adv Micro Machines Inc, Cleveland, OH 44106 USA

来源：

ELECTRONICS LETTERS | 1999年 / 35卷 / 03期

关键词：

D O I：

10.1049/el:19990032

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS switch has been developed for microwave applications. The switch has an actuation of 30V, a response time of 20 mu s, and mechanical robustness to withstand 10(9) actuations. An RF performance with >50dB isolation below 2GHz and <0.2dB insertion loss from DC to 40GHz has been measured.

引用

页码：224 / 226

页数：3