Evidence of multiphase nucleation in perovskite film growth on MgO substrate from medium energy ion scattering analysis:: Example of YBaCuO and (Ba,Sr)TiO3

被引：26

作者：

Afrosimov, V

Il'in, RN

Karmanenko, SF

Melkov, AA

Sakharov, VI

Serenkov, IT

机构：

[1] RAS, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia

[2] State Electrotech Univ, St Petersburg 197376, Russia

来源：

THIN SOLID FILMS | 2005年 / 492卷 / 1-2期

关键词：

medium energy ion scattering; perovskites; nucleation; sputtering;

D O I：

10.1016/j.tsf.2005.07.130

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Initial stages of perovskite YBa2Cu3O7-x and BaySr1-yTiO3 films growth on MgO substrate were studied by middle energy ion scattering (MEIS) with He(+)190 keV ions. It was found that at the nucleation of main (YBa2Cu3O7-x or BaySr1-yTiO3) phases the simultaneous formation of additional phases consisting of protoxides Cu2O or TiO takes place. The formation of protoxide nuclei is favoured by well fit of their lattice parameters with substrate MgO ones. With increasing of the substrate coverage and film thickness over about 10 nm the transition from two-phase nucleation to monophase coalescence occurs due to decrease of substrate influence on the film growth process. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：146 / 152

页数：7

共 26 条

[1]

Afrosimov V. V., 1996, Technical Physics, V41, P1240

[2] Effect of substrates on the morphology of BaxSr1-xTiO3 nanometer-scale films [J].