An AFM-based device for in-situ characterization of nano-wear

被引：3

作者：

Deladi, S ^{[1
]}

Berenschot, JW ^{[1
]}

de Boer, MJ ^{[1
]}

Krijnen, GJM ^{[1
]}

Elwenspoek, MC ^{[1
]}

机构：

[1] Univ Twente, Transducers Sci & Technol Grp, MESA & Res Inst, NL-7500 AE Enschede, Netherlands

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290552

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g' wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.

引用

页码：181 / 184

页数：4

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