A rapid prototyping technique for the fabrication of solvent-resistant structures

被引:96
作者
Harrison, C [1 ]
Cabral, JT [1 ]
Stafford, CM [1 ]
Karim, A [1 ]
Amis, EJ [1 ]
机构
[1] NIST, Div Polymers, Gaithersburg, MD 20899 USA
关键词
D O I
10.1088/0960-1317/14/1/021
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a rapid prototyping technique for the fabrication of solvent-resistant channels up to and exceeding one millimeter in height. The fabrication of channels with such dimensions by conventional lithography would be both challenging and time consuming. Furthermore, we show that this technology can be used to fabricate channels with a depth that varies linearly with distance. This technique requires only a long-wavelength ultraviolet source, a mask made by a desktop printer and a commercially available optical adhesive. We demonstrate two lithographic methods: one that fabricates channels sealed between glass plates (close-faced) and one that fabricates structures on a single plate (open-faced). The latter is fully compatible with silicon replication techniques to make fluid handling devices.
引用
收藏
页码:153 / 158
页数:6
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