Coupled effects of chloride ions and branch chained polypropylene ether LP-1™ on the electrochemical deposition of copper from sulfate solutions

被引:43
作者
Goldbach, S
Messing, W
Daenen, T
Lapicque, F
机构
[1] INPL, ENSIC, CNRS, Lab Sci Genie Chim, F-54001 Nancy, France
[2] Philips PMF NV, NL-5600 Eindhoven, Netherlands
关键词
copper electrodeposition; sulfate bath; effect of additives; voltammetry; impedance measurements;
D O I
10.1016/S0013-4686(98)00112-1
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The paper presents the results of electrochemical investigations of copper deposition from a sulfate/sulfuric bath of industrial relevancy and containing two additives. In particular the effect of chloride ion with polypropylene ether (LP-1(TM)) could be highlighted by voltammetry and impedance measurements. When used without chloride ion LP-1 adsorbs at the surface which reduces significantly the current density and the double layer capacitance. A current peak was observed for the simultaneous presence of the two additives and this was attributed to a sudden inhibition of the surface: in a narrow range of potential Cl-complexes were assumed to desorb from the surface, allowing significant adsorption of inert LP-I molecules. Besides, kinetic parameters and the diffusion coefficient of cupric ion were correlated to the concentrations of additives, copper sulfate and sulfuric acid in a broad range of concentration. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:323 / 335
页数:13
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