Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave

A new source for the generation of overdense plasma is developed using an electron cyclotron resonance (ECR) technique in a rectangular waveguide by a high-power (1 kW) microwave of frequency 2.45 GHz. The characteristics of the plasma for Ar gas are presented, including a large surface area to fill the entire waveguide of length 100 cm with uniformity +/-3% over 50 cm. With the help of a Langmuir probe, plasma density about 10(12) cm(-3) and electron temperature of 8-12 eV are observed, and their dependence on the background gas pressure and magnetic field are also examined. It is shown that these parameters can be controlled by adjusting the gas pressure, magnetic fields, and/or microwave power. Such a plasma could be useful in plasma processing and in background plasma for the concept of plasma-based particle accelerators as well. (C) 2004 American Institute of Physics.