Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach

被引:92
作者
Darling, RB [1 ]
Hivick, C [1 ]
Xu, JY [1 ]
机构
[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA
关键词
compact models; squeeze films; damping; Green's functions;
D O I
10.1016/S0924-4247(98)00109-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An analytical method based upon a Green's function solution to the linearized Reynolds equation is presented which allows the resulting forces from compressible squeeze film damping to be rapidly calculated for arbitrary acoustic venting conditions along the edges of a moveable structure. The resulting models are computationally compact, and thus applicable for dynamic system simulation purposes. Arbitrary deflection profiles can also be treated, enabling the calculation of damping effects for cantilevers, diaphragms, tilting plates, and drum-head modes. The method is theoretically described and a catalog of several useful cases is then presented to illustrate its use. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:32 / 41
页数:10
相关论文
共 15 条
[1]   A COMPARISON OF SQUEEZE-FILM THEORY WITH MEASUREMENTS ON A MICROSTRUCTURE [J].
ANDREWS, M ;
HARRIS, I ;
TURNER, G .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 36 (01) :79-87
[2]  
BERANEK LL, 1954, ACOUSTICS, P128
[3]   ON ISOTHERMAL SQUEEZE FILMS [J].
BLECH, JJ .
JOURNAL OF LUBRICATION TECHNOLOGY-TRANSACTIONS OF THE ASME, 1983, 105 (04) :615-620
[4]  
BOURGEOIS C, 1997, 1997 INT C SOL STAT, P1117
[5]   A STUDY OF FLUID SQUEEZE-FILM DAMPING [J].
GRIFFIN, WS ;
RICHARDSON, HH ;
YAMANAMI, S .
JOURNAL OF BASIC ENGINEERING, 1966, 88 (02) :451-+
[6]  
Langlois WE., 1961, Q APPL MATH, Vxx, P131, DOI DOI 10.1090/QAM/99963
[7]  
MORSE PM, 1953, METHODS THEORETICAL, V1, P857
[8]  
POZRIKIDIS C, 1997, INTRO THEORETICAL CO, P243
[9]   Simulation model for micromechanical angular rate sensor [J].
Veijola, T ;
Kuisma, H ;
Lahdenpera, J ;
Ryhanen, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :113-121
[10]   EQUIVALENT-CIRCUIT MODEL OF THE SQUEEZED GAS FILM IN A SILICON ACCELEROMETER [J].
VEIJOLA, T ;
KUISMA, H ;
LAHDENPERA, J ;
RYHANEN, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1995, 48 (03) :239-248