STM investigation of energetic carbon cluster ion penetration depth into HOPG

被引：40

作者：

Brauchle, G ^{[1
]}

RichardSchneider, S ^{[1
]}

Illig, D ^{[1
]}

Beck, RD ^{[1
]}

Schreiber, H ^{[1
]}

Kappes, MM ^{[1
]}

机构：

[1] UNIV KARLSRUHE,INST PHYS CHEM 2,D-76128 KARLSRUHE,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 112卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01015-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present an STM study of fullerene cluster ion induced damage on HOPG surfaces resulting from 0.5-23 keV impact. Some impact events show up as uniform protrusions some as hillocks comprising craters. The diameters of the surface defects are discussed in terms of a thermal spike model. Oxidation of the irradiation defects leads to formation of holes with depths depending on ion energy. Mean energy loss is found to be about 2200 eV per carbon layer, independent of impact energy over the investigated range.

引用

页码：105 / 108

页数：4

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