Ion beam radiation damage effects in rutile (TiO2)

被引:37
作者
Hartmann, T [1 ]
Wang, LM
Weber, WJ
Yu, N
Sickafus, KE
Mitchell, JN
Wetteland, CJ
Nastasi, MA
Hollander, MG
Baker, NP
Evans, CR
Tesmer, JR
Maggiore, CJ
机构
[1] Los Alamos Natl Lab, Div Mat Sci & Technol, Los Alamos, NM 87545 USA
[2] Univ Michigan, Ann Arbor, MI 48109 USA
[3] Pacific NW Lab, Richland, WA 99352 USA
[4] Texas Instruments Inc, Dallas, TX USA
关键词
TiO2; rutile; radiation damage; noble gas ion implantation;
D O I
10.1016/S0168-583X(98)00134-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Radiation damage accumulation in the rutile phase of titanium dioxide (TiO2) have been studied by Rutherford Backscattering Spectroscopy in channeling geometry (RBS/c) and by transmission electron microscopy (TEM). A large temperature dependence of damage accumulation in rutile was observed. Defect accumulation determined in situ by RBS/c occurs far more rapidly in samples irradiated at 160 K compared to 300 K, A rutile single crystal irradiated at 160 K was rendered fully amorphous at a fluence of 4 x 10(18) Xe2+/m(2), compared to a critical amorphization fluence of 8 x 10(19) Xe2+/m(2) for a crystal irradiated at 300 K. In samples irradiated at 300 K a defect denuded zone at the crystal surface was observed to accompany a buried damage layer. In samples irradiated at 160 K, no defect denuded zone was observed. These observations indicate that there is a large temperature dependence associated with thermally activated point defect mobility in rutile. Moreover, in in situ irradiation experiments using 1.5 MeV Xe+ ions, a critical amorphization temperature of 200 K was observed. The rutile structure is much more susceptible to radiation damage induced by point defect accumulation, compared to dense collision cascades. In the experiments presented here, only the He+ ion irradiation leads to complete amorphization, combined with substantial changes in the micro-hardness and elastic (Young's) modulus. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:398 / 403
页数:6
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