Emission uniformity enhancement between microfabricated tips in cold cathode arrays

被引：19

作者：

Schwoebel, PR

Spindt, CA

Holland, CE

Panitz, JA

机构：

[1] SRI Int, Appl Phys Sci Lab, Menlo Park, CA 94025 USA

[2] Univ New Mexico, Dept Phys & Astron, Albuquerque, NM 87131 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 02期

关键词：

D O I：

10.1116/1.1347041

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The current-voltage characteristics can vary significantly between individual microfabricated tips in as-fabricated arrays of cold cathodes. Such emission nonuniformity is undesirable in device applications. We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity will allow for more reliable array operation at increased electron emission current densities. (C) 2001 American Vacuum Society.

引用

页码：582 / 584

页数：3

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