The micro fabrication using selective laser sintering micron metal powder

被引:6
作者
Chen, JM [1 ]
Wang, XB [1 ]
Zuo, TC [1 ]
机构
[1] Beijing Polytech Univ, Natl Ctr Laser Technol, Beijing 100022, Peoples R China
来源
SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷
关键词
microfabrication; doubling frequency laser; metal powder; selective laser micro sintering;
D O I
10.1117/12.501147
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
Selective laser sintering(SLS) is a process that uses a rastering laser to sinter powder particles into a computer defined shape. In order to fabricate micro part with laser sintering the laser beam spot should be focused smaller, on the other hand the size of sintered powder particles should be smaller too. Therefore Nd:YAG laser doubling frequency is used to obtain mini-focus. Based on theories of nonlinear and resonant cavity, an equipment which perform frequency doubling on YAG laser(1.06mum) by the external resonant ring cavity has been designed. With the equipment the wave length of 0.532mum green light was output. The focused laser spot of 15mum diameter was obtained with IOW power. Meanwhile the micron metal powder was used in selective laser micro sintering(SLMS). The behavior of laser sintering different metal powder was investigated. Finally the micro Chinese characters which is as small as a tip of match made with laser selective micro sintering micron metal powder are shown.
引用
收藏
页码:647 / 651
页数:5
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