Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors

被引：77

作者：

Chen, Z. H. ^{[1
]}

Jie, J. S. ^{[1
]}

Luo, L. B. ^{[1
]}

Wang, H. ^{[1
]}

Lee, C. S. ^{[1
]}

Lee, S. T. ^{[1
]}

机构：

[1] City Univ Hong Kong, Dept Phys Mat & Mat Sci, Kowloon, Hong Kong, Peoples R China

来源：

NANOTECHNOLOGY | 2007年 / 18卷 / 34期

关键词：

D O I：

10.1088/0957-4484/18/34/345502

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Silicon nanowires (SiNWs) modified by palladium (Pd) nanoparticles were investigated for hydrogen detection. SiNWs were fabricated via a thermal evaporation method using tin (Sn) as the catalyst. The as-grown SiNWs were chemically treated to remove surface oxide and then coated with a thin layer of Pd nanoparticles. A gas sensor device was fabricated with the Pd-functionalized SiNWs. The sensor showed better sensitivity to hydrogen and faster responding time than the macroscopic Pd wire hydrogen sensor.

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